Article

Ji, Z, Xue, Y, Ren, P, Ye, J, Li, Y, Wu, Y, Wang, D, Wang, S, Wu, J, Wang, Z, Wen, Y, Xia, S, Zhang, L, Zhang, J, Liu, J, Luo, J, Deng, H, Wang, R, Yang, L and Huang, R (2023) Towards Reliability- & Variability-aware Design-Technology Co-optimization in Advanced Nodes: Defect Characterization, Industry-friendly Modelling and ML-assisted Prediction. IEEE Transactions on Electron Devices, 71 (1). pp. 138-150. ISSN 0018-9383