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Microstructures Manufactured in Diamond by Use of Laser Micromachining.

Dudek, M, Rosowski, A, Kozanecki, M, Jaszczak, M, Szymański, W, Sharp, MC and Karczemska, A (2020) Microstructures Manufactured in Diamond by Use of Laser Micromachining. Materials, 13 (5). ISSN 1996-1944

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Open Access URL: http://www.mdpi.com/1996-1944/13/5/1199 (Published version)

Abstract

Different microstructures were created on the surface of a polycrystalline diamond plate (obtained by microwave plasma-enhanced chemical vapor deposition-MW PECVD process) by use of a nanosecond pulsed DPSS (diode pumped solid state) laser with a 355 nm wavelength and a galvanometer scanning system. Different average powers (5 to 11 W), scanning speeds (50 to 400 mm/s) and scan line spacings ("hatch spacing") (5 to 20 µm) were applied. The microstructures were then examined using scanning electron microscopy, confocal microscopy and Raman spectroscopy techniques. Microstructures exhibiting excellent geometry were obtained. The precise geometries of the microstructures, exhibiting good perpendicularity, deep channels and smooth surfaces show that the laser microprocessing can be applied in manufacturing diamond microfluidic devices. Raman spectra show small differences depending on the process parameters used. In some cases, the diamond band (at 1332 cm-1) after laser modification of material is only slightly wider and shifted, but with no additional peaks, indicating that the diamond is almost not changed after laser interaction. Some parameters did show that the modification of material had occurred and additional peaks in Raman spectra (typical for low-quality chemical vapor deposition CVD diamond) appeared, indicating the growing disorder of material or manufacturing of the new carbon phase.

Item Type: Article
Uncontrolled Keywords: 03 Chemical Sciences, 09 Engineering
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Divisions: Engineering & Technology Research Institute
Publisher: MDPI
Related URLs:
Date Deposited: 24 Mar 2020 11:22
Last Modified: 24 Mar 2020 11:30
DOI or Identification number: 10.3390/ma13051199
URI: http://researchonline.ljmu.ac.uk/id/eprint/12591

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