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Ji, Z, Xue, Y, Ren, P, Ye, J, Li, Y, Wu, Y, Wang, D, Wang, S, Wu, J, Wang, Z, Wen, Y, Xia, S, Zhang, L, Zhang, J, Liu, J, Luo, J, Deng, H, Wang, R, Yang, L and Huang, R (2023) Towards Reliability- & Variability-aware Design-Technology Co-optimization in Advanced Nodes: Defect Characterization, Industry-friendly Modelling and ML-assisted Prediction. IEEE Transactions on Electron Devices, 71 (1). pp. 138-150. ISSN 0018-9383

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